[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [8p-PA2-14] A High-Resolution Capacitive Sensor Circuit for MEMS Accelerometers

〇Motohiro Takayasu^1,3, Shiro Dosho^1,3, Hiroyuki Ito^1,3, Daisuke Yamane^1,3, Toshifumi Konishi^1,2,3, Katsuyuki Machida^1,3, Noboru Ishihara^1,3, Kazuya Masu^1,3 (1.Tokyo Tech., 2.NTT-AT, 3.JST-CREST)

Keywords:capacitive sensor circuit, MEMS Accelerometer