Tatsuhiko Higashiki

→ Search for Tatsuhiko Higashiki in Google Scholar

Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:30 PM - 6:00 PM 512 (512)

Symposium (Oral)
| Symposium
| Progress and outlook of nanoimprint technology

[15p-512-1~9] Progress and outlook of nanoimprint technology

3:30 PM - 4:15 PM

[15p-512-4] Nano imprint lithography appling for semiconductor devices

〇Tatsuhiko Higashiki^1,2 (1.TOSHIBA, 2.NuFlare)