Hiroki Utsumi

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 9:15 AM - 12:00 PM 304 (304)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:15 AM - 11:30 AM

△ [14a-304-8] Self-Aligned Planar Metal Double-Gate Cu-MIC Poly-Ge TFTs Fabricated at 300℃ on Glass Substrate

〇Hiroki Utsumi¹, Taisei Sasaki¹, Shunya Sekiguchi¹, Shoya Takeuchi¹, Hiroki Ohsawa¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)