Tatsuya Mayama

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 6:15 PM 412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-412-1~18] 6.2 Carbon-based thin films

3:00 PM - 3:15 PM

△ [15p-412-7] Effect of Oxygen Plasma on Film Structure for Different Types of DLC film

〇(B)Tatsuya Mayama¹, Hiroyuki Watanabe¹, Masanori Hiratsuka², Hitomi Tsuboi², Hideki Nakamori², Akihiko Homma¹, Kenji Hirakuri¹, Yasuharu Ohgoe¹ (1.Tokyo Denki Univ., 2.Nanotech Corp.)

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