Eri Kikuchi

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 11:30 AM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-423-1~9] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

9:00 AM - 9:15 AM

[15a-423-1] Observation of fluorescence moire fringe for imprint alignment

〇Eri Kikuchi¹, Yota Ishito¹, Shinya Matsubara², Takahiro Nakamura¹, Masayuki Abe², Masaru Nakagawa¹ (1.Tohoku Univ., 2.Asahi Kasei Co.)