Mengnan Ke

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

4:00 PM - 4:15 PM

▲ [16p-413-8] MOS interface properties of ALD Al₂O₃/Y₂O₃/GeO_x/Ge gate stacks with plasma post oxidation

〇(D)Mengnan Ke¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Tokyo Univ.)