Yukako Kato

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 6:15 PM 412 (412)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[14p-412-1~18] 6.2 Carbon-based thin films

2:45 PM - 3:00 PM

[14p-412-7] Surface Damage of Boron-doped Diamond by ICP etching

〇Yukako Kato¹, Hiroyuki Kawashima^1,2, Toshiharu Makino¹ (1.AIST, 2.Tsukuba Univ.)