akitsugu Ueda

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

11:00 AM - 11:15 AM

[16a-413-8] Thinning of high-k gate stack using new Flash Lamp Annealing (FLA) tool with low oxygen concentration (0.1ppm)

〇akitsugu Ueda¹, Hikaru Kawarazaki¹, Masashi Furukawa¹, Takayuki Aoyama¹, Shinichi Kato¹, Ippei Kobayashi¹ (1.SCREEN)