Hiroaki Kawamura

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 12:15 PM 301 (301)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[17a-301-1~12] 15.6 Group IV Compound Semiconductors (SiC)

12:00 PM - 12:15 PM

[17a-301-12] Substrate Effect on Insulating Characteristics of TEOS - CVD - SiO₂ Film

〇Hiroaki Kawamura¹, Kanta Maeda¹, Ryu Hasunuma¹, Kikuo Yamabe¹ (1.Tsukuba Univ.)