Ryo Matsumura

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[16p-412-1~20] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

3:30 PM - 3:45 PM

[16p-412-10] Formation of p⁺/n Ge junction with steep impurity profile by snowplow effect of NiGe

〇Ryo Matsumura^1,2, Takumi Katoh¹, Ryotaro Takaguchi¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. of Tokyo, 2.JSPS Research Fellow)