Haruhiko Ito

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[16p-P3-1~23] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[16p-P3-7] Fabrication of a-SiC_x:H thin films from the plasma decomposition of Si(CH₃)₄ - discussion on the surface O atoms and the film thickness

〇Haruhiko Ito¹ (1.Nagaoka Univ. Tech.)