Noriaki Toyoda

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 10:00 AM - 12:00 PM 424 (424)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[16a-424-1~7] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

11:45 AM - 12:00 PM

[16a-424-7] Atomic layer etching with gas cluster ion beam

〇Noriaki Toyoda¹, Akihiro Ogawa¹, Isao Yamada¹ (1.Univ. of Hyogo)