Hironori Igarashi

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 4:15 PM 318 (318)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15p-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

3:15 PM - 3:30 PM

[15p-318-8] Developing of inspection system for Mo/Si multi-layer mirror using high harmonics generation source

〇Hironori Igarashi^1,2, Shuntaro Tani², Masakazu Kobayashi¹, Kouji Kakizaki¹, Yohei Kobayashi² (1.GIGAPHOTON inc., 2.ISSP, Univ. of Tokyo)