Masahiro Tsukazaki

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:45 PM - 6:30 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[16p-E206-1~17] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:30 PM - 2:45 PM

[16p-E206-4] A study on H₂ concentration dependence on the Si surface flattening with Ar/H₂ annealing and its device applications

〇Masahiro Tsukazaki¹, Sohya Kudoh¹, Shun-ichiro Ohmi¹ (1.Tokyo Tech)