Marek Edward Schmidt

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:15 PM - 6:00 PM 315 (315)

Symposium (Oral)
| Symposium
| Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

[16p-315-1~11] Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

5:45 PM - 6:00 PM

▲ [16p-315-11] Interaction of gas field ionized nitrogen with silicon

〇(P)Marek Edward Schmidt¹, Xiaobin Zhang¹, Yoshifumi Oshima¹, Le The Anh¹, Anto Yasaka², Teruhisa Kanzaki¹, Manoharan Muruganathan¹, Masashi Akabori¹, Tatsuya Shimoda¹, Hiroshi Mizuta¹ (1.JAIST, 2.Hitachi High-Tech Science Corp.)

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