Takahiro Yamada

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:15 PM - 5:45 PM 315 (315)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[15p-315-1~17] 13.8 Compound and power electron devices and process technology

2:30 PM - 2:45 PM

[15p-315-6] Diffusion of Ga into SiO₂ Layer in SiO₂/GaN Structures and Its Impact on Electrical Properties

〇Takahiro Yamada¹, Kenta Watanabe¹, Mikito Nozaki¹, Katsunori Ueno², Shinya Takashima², Masaharu Edo², Tokio Takahashi³, Mitsuaki Shimizu³, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ., 2.Fuji Electric, 3.AIST)