[At-10] Samco Inc. RIE Systems(Reactive Ion Etching), ICP Etching Systems(Inductively Coupled Plasma Etching), DRIE Systems(Deep Reactive Ion Etching), ALD Systems(Atomic Layer Deposition), PECVD Systems(Plasma Enhan... Bookmark
[At-5] SANYU ELECTRON CO., LTD. Table Top Sputtering System SC-701Mk2ADVANCE, Mini Programmable Sputtering System SC-701HMC2, Vacuum Evaporator SVC-700TMSG/7PS80 Bookmark
[Jsp-18] SENTECH Instruments GmbH / Hakuto Co., Ltd. Spectroscopic Ellipsometer, Atomic Layer Deposition System Bookmark
[So-15] SIGMA TECH Co., LTD. 1nm Feedback stage system, 10nm Feedback stage system, Vacuum 1nm Feedback stage Bookmark