Mask-less Exposure Equipment, Laser patarning system for thin film, Surface Activated Bonding Equipment

TBD

VirtualLab, OOFELIE

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■EUV~X線用カメラ ■ピクセル検出器 ■X線用多層膜ミラー ■EUV用薄膜フィルター ■セラミック絶縁管

RHEED Gun & Power Supply, Analytical RHEED System, in-situ Wafer Temp Sensor, UHV Evaporator, Vacuum Gauge, etc.

inVia Raman microscope

X-ray Diffractometer, 2D Hybrid Pixel Array Detector, Thermal Analyzer

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Positioners for low temp. and UHV, Cryostats, Fluxgate Magnetometers, Resistance Bridge for LT

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RIE Systems(Reactive Ion Etching), ICP Etching Systems(Inductively Coupled Plasma Etching), DRIE Systems(Deep Reactive Ion Etching), ALD Systems(Atomic Layer Deposition), PECVD Systems(Plasma Enhan...

TBD

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TBD

Table Top Sputtering System SC-701Mk2ADVANCE, Mini Programmable Sputtering System SC-701HMC2, Vacuum Evaporator SVC-700TMSG/7PS80

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