[14a-313-1~12] 12.1 Fabrications and Structure Controls

[14a-313-8] High-Efficiency Three-Dimensional Vapor Deposition of Rare Metals based on Metal-Atom Desorption from Organic Films

〇(B)Riku Ou¹, Saki Matsumoto¹, Ryo Nishimura², Kingo Uchida², Tsuyoshi Tsujioka¹ (1.Osaka Kyoiku Univ., 2.Ryukoku Univ.)

Keywords:vacuum evaporation, rare metal, low glass transition temperature

Vacuum evaporation is widely used to obtain a metal-film coating on substrates and/or targets but results in a large loss of evaporation materials. We have developed a selective metal vapor deposition method in which metal-vapor atoms can be deposited selectively without a shadow mask. The core phenomenon of selective deposition is the desorption of metal-vapor atoms from organic surfaces with a low-glass transition temperature (low-Tg). We investigated metal-atom desorption from low-Tg polymer [polydimethylsiloxane (PDMS)] surfaces during vacuum deposition and found that greater than 2-μm-thick PDMS film enables high desorption efficiency. We propose a novel vacuum deposition methods: metal-vapor integration. This method enabled extremely high deposition efficiency and three-dimensional deposition in a one-batch process. The method can greatly widen applications in a vacuum deposition field.