[14a-501-1~11] 10.3 Spin devices, magnetic memories and storages

▼ [14a-501-10] Fabrication of Single Crystalline Magnetoresistive Sensors on Polycrystalline Electrode using Three-Dimensional Integration Technology

〇(DC)Jiamin CHEN^1,3, Yuya Sakuraba¹, Jun Liu¹, Kay Yakushiji², Hideki Takagi², Naoya Watanabe², Akio Fukushima², Katsuya Kikuchi², Shinji Yuasa², Kazuhiro Hono^1,3 (1.NIMS, 2.AIST, 3.Tsukuba Univ.)

Keywords:CPP-GMR, Read head sensor, magnetic sensor

We fabricated high-performance fully epitaxial current-perpendicular-to-plane giant magnetoresistance (CPP-GMR) multilayer on a Si(001) wafer at process temperatures of up to 500ºC and then integrated it on a poly-crystalline electrode using three-dimensional integration processes. These processes enable applying the epitaxial CPP-GMR devices to the read sensors for ultrahigh-density hard disk drives.