The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K

[14a-502-1~10] 21.1 Joint Session K

Tue. Mar 14, 2017 9:30 AM - 12:15 PM 502 (502)

Masataka Higashiwaki(NICT)

11:30 AM - 11:45 AM

[14a-502-8] Fabrication and Structural Characterization of α-Ga2O3 Thin Films on m-plane Sapphire Substrates by Mist Chemical Vapor Deposition

Katsuya Ota1, Takahito Sekiyama1, Kazuaki Akaiwa1, Tomoki Abe1, Kunio Ichino1 (1.Tottori Univ.)

Keywords:gallium oxide, Mist Chemical Vapor Deposition, crystal growth