Fabrication and Structural Characterization of α-Ga<sub>2</sub>O<sub>3</sub> Thin Films on m-plane Sapphire Substrates by Mist Chemical Vapor Deposition

Presentation information

Oral presentation

21 Joint Session K » 21.1 Joint Session K

Tue. Mar 14, 2017 9:30 AM - 12:15 PM 502 (502)

11:30 AM - 11:45 AM

〇Katsuya Ota¹, Takahito Sekiyama¹, Kazuaki Akaiwa¹, Tomoki Abe¹, Kunio Ichino¹ (1.Tottori Univ.)

Keywords:gallium oxide, Mist Chemical Vapor Deposition, crystal growth