The 64th JSAP Spring Meeting, 2017

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[14a-503-1~12] 15.4 III-V-group nitride crystals

Tue. Mar 14, 2017 9:00 AM - 12:15 PM 503 (503)

Tsutomu Araki(Ritsumeikan Univ.), Jitsuo Ohta(Univ. of Tokyo)

9:15 AM - 9:30 AM

[14a-503-2] AlN deposition on Sapphire substrate by sputtering

〇Yuta Yamaki1, Sho Iwayama2, Hideto Miyake1,2, Kazumasa Hiramatsu1, Eiji Komatsu3, Nobuyuki Terayama3 (1.Mie Univ.,Eng, 2.RIS, 3.Shinko Seiki Co.,LTd)

Keywords:AlN, sputtering