[14a-512-1~11] 3.7 Laser processing

[14a-512-3] Selective patterning of p- and n-types thermoelectric films using femtosecond laser reductive sintering of CuO/NiO mixed nanoparticles

〇Mizue Mizoshiri¹, Junpei Sakurai¹, Seiichi Hata¹ (1.Nagoya Univ.)

Keywords:femtosecond laser, laser reduction, thermoelectric film

P- and n-type thermoelectric films were selectively fabricated using femtosecond laser reductive sintering of CuO/NiO mixed nanoparticles by controlling the laser irradiation conditions. When the laser pulse energy was fixed to be 0.62 nJ, Cu-Ni generation decreased with decreasing the laser scanning speed in 1-20 mm/s, by contrast, the Cu2O and NiO generation increased with decreasing the laser scanning speed. Seebeck coefficient of the fabricated micropatterns exhibited n-type and p-type at laser scanning speed of 5-20 mm/s and 1 mm/s, respectively. Pn-type thermoelectric films were selectively formed by controlling the laser irradiation conditions.