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[14p-213-8] Preferred orientation and surface structures of Pt films grown on SrTiO3(100)
Keywords:Catalyst, Pt films, Eptaxial
We fabricated Pt films on SrTiO3(100) by dc-magnetron sputtering method, and investigated preferred orientation, surface structure and electrochemical property. A film grown at 400°C showed two-dimensional polycrystalline features of Pt(111). Films grown at 600 and 700°C exhibited preferred orientation with mixed planes of (100), (111) and (110). By increasing growth temperature to 750°C the film indicated dominantly preferred orientation of (100). The films grown at 600 and 700°C were composed of island with roughness of several tens nm. Observation by reflection high-energy reflection revealed that the islands grow in epitaxial relationship of [010]Pt // [011]SrTiO3. The relationship changed to [010]Pt // [010]SrTiO3 at growth temperature of 750°C.