[14p-412-1~18] 6.2 Carbon-based thin films

[14p-412-10] X-ray absorption fine structure study of heavily P doped (111) and (001) diamond

〇Shinichi Shikata¹, Koji Yamaguchi¹, Akihiko Fujiwara¹, Yusuke Tamenori², Junpei Yahiro³, Masahiro Kunisu³, Takatoshi Yamada⁴ (1.Kwansei Gakuin Univ, 2.Japan SR. RI., 3.Toray RC, 4.AIST)

Keywords:Diamond, P dope, XAFS

XANES measurements were carried out for P doped diamond films. The main strong peak observed at 2147eV and three broad peaks centered at the 2150 eV et al., are observed. These are assigned as interstitial and substitutional site, respectively with the estimation by the simulation.The EXAFS result also showed the same results.