The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[14p-419-1~16] 6.3 Oxide electronics

Tue. Mar 14, 2017 1:30 PM - 6:00 PM 419 (419)

Atsushi Fukuchi(北大), Yusuke Kozuka(東大)

5:00 PM - 5:15 PM

△ [14p-419-13] Fabrication of flat surface ZION films on lattice mismatched substrate by RF magnetron sputtering

〇Nanoka Miyahara1, Koichi Matsushima1, Hyunwoong Seo1, Kazunori Koga1, Masaharu Shiratani1, Naho Itagaki1 (1.Kyushu Univ.)

Keywords:(ZnO)x(InN)1-x, sputtering, surface morphology