Zn-In-O-N (ZION) films deposited by reactive co-sputtering

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Tue. Mar 14, 2017 1:30 PM - 6:00 PM 419 (419)

5:15 PM - 5:30 PM

〇Tomohiko Hara¹, Junjun Jia¹, Shin-ichi Nakamura¹, Yuzo Shigesato¹ (1.Aoyama Gakuin Univ.)

Keywords:ZnInON, oxynitride, band gap