The 64th JSAP Spring Meeting, 2017

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6 Thin Films and Surfaces » 6.3 Oxide electronics

[14p-419-1~16] 6.3 Oxide electronics

Tue. Mar 14, 2017 1:30 PM - 6:00 PM 419 (419)

Atsushi Fukuchi(北大), Yusuke Kozuka(東大)

5:45 PM - 6:00 PM

△ [14p-419-16] Pulsed laser deposition of LaAlO3 thin films on SrTiO3(100) substrate using the 5th harmonic of Nd:YAG laser (wavelength of 213 nm)

〇(B)Naoto Nakamura1, Issei Sugiyama1, Shimizu Ryota1, Hitosugi Taro1,2 (1.Tokyo Tech, 2.Tohoku Univ.)

Keywords:Oxide electronics, Pulsed laser deposition