The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Shoji Hotta(Hitachi), Hiroki Yamamoto(Osaka Univ.)

1:15 PM - 1:30 PM

[14p-423-1] Study on Reaction Mechanisms of Metal Resists

〇(M1)Satoshi Ishihara1, Hiroki Yamamoto1, Jelius Santillan2, Toshiro Itani2, Takahiro Kozawa1 (1.ISIR, Osaka Univ., 2.EIDEC)

Keywords:Metal Resists