3:45 PM - 4:00 PM
△ [14p-423-10] Development of a wideband Mo/Si Multilayer mirror for EUV polarization control
Keywords:extreme ultraviolet, Mo/Si multilayer, Polarization control
Presentation information
Oral presentation
CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication
[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication
Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)
Shoji Hotta(Hitachi), Hiroki Yamamoto(Osaka Univ.)