Experimental study on 3D photolithography by Built-in lens mask

Toshiki Tanaka; Daiki Sugihara; Masaru Sasago; Hisao Kikuta; Hiroaki Kawata; Yoshihiko Hirai

Presentation information

Oral presentation

CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Shoji Hotta(Hitachi), Hiroki Yamamoto(Osaka Univ.)

4:30 PM - 4:45 PM

[14p-423-13] Experimental study on 3D photolithography by Built-in lens mask

Toshiki Tanaka¹, Daiki Sugihara¹, Masaru Sasago¹, Hisao Kikuta¹, Hiroaki Kawata¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

Keywords:photolithography, 3 dimension, mask

Experimental study for 3-dimensional photolithography is demonstrated using the built-in lens mask having complex optical transmittance. Pyramidal frame structures are demonstrated and the results agree with the simulation works. We confirmed the 3-dimensional photolithography is realized by the built-in lens mask.