Study of Electron Emission Characteristics of Nano-crystalline Si Ballistic Electron Emitter with Graphene Surface Electrode

Akira Kojima; Naokatsu Ikegami; Ryutaro Suda; Nobuyoshi Koshida

Presentation information

Oral presentation

CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-424-1~16] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Tue. Mar 14, 2017 1:15 PM - 5:30 PM 424 (424)

Tadahiro Kawasaki(JFCC), Katsuyoshi Miura(Osaka Univ.), Katsuhisa Murakami(AIST)

4:45 PM - 5:00 PM

[14p-424-14] Study of Electron Emission Characteristics of Nano-crystalline Si Ballistic Electron Emitter with Graphene Surface Electrode

〇Akira Kojima¹, Naokatsu Ikegami¹, Ryutaro Suda², Nobuyoshi Koshida² (1.Tohoku Univ., 2.Tokyo Univ. A&T)

Keywords:ballistic electron, nanosilicon, graphene

Characteristics of energy distribution of emitted electrons from a nano-silicon (nc - Si) ballistic electron emitter with a graphene film as a surface electrode was studied by using a hemispherical analyzer. The results of the analyses showed that the original ballistic conduction characteristic in the nc - Si layer became apparent due to suppression of the energy dissipation in the surface electrode layer.