The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-424-1~16] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Tue. Mar 14, 2017 1:15 PM - 5:30 PM 424 (424)

Tadahiro Kawasaki(JFCC), Katsuyoshi Miura(Osaka Univ.), Katsuhisa Murakami(AIST)

5:15 PM - 5:30 PM

[14p-424-16] Measurement of emission current from volcano-structured Spindt-type field emitter arrays using evaluation instrument for multi-emitters

〇Kodai Taguchi1, Mika Nakano1, Hidekazu Murata1, Eiji Rokuta1, Masayoshi Nagao2, Katsuhisa Murakami2 (1.Meijo Univ., 2.AIST)

Keywords:Spindt-type field emitter arrays, evaluation instrument for multi-emitters, micro electron source