[14p-B5-1~11] 15.1 Bulk crystal growth

[14p-B5-4] Numerical analysis of growth rate and interface shape in CZ-Si crystal growth

〇Yuta Saibara¹, Nobumasa Kariya¹, Hodaka Kutsukage², Toshinori Taishi², Keigo Hoshikawa² (1.M.SETEK CO.,LTD., 2.Sinshu Univ.)

Keywords:CZ-Si crystal growth

Numerical analysis of relationship between growth rate and growth interface shape
in CZ-Si crystal growth was studied. It was found that the growth interface shape of
calculations was in good agreement with one of experiments and also convex magnitude
was increased with increase of the growth rate.