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[14p-F201-14] Sensitivity and detection limit of carbon concentration measurement in silicon crystal
(2) Incorrect Detection limit
Keywords:silicon crystal, carbon concentration measurement, infrared absorption
“Detection limit” of carbon concentration by infrared absorption spectroscopy is incorrectly used by the researchers of other techniques. It is around 1E+15cm-3 which is far from the research reorts down to 1E+14cm-3. “Detection limit” of SIMS and CPAA is also stated.