3:45 PM - 4:00 PM
[14p-F201-8] Measurement of Low Carbon Concentration in Silicon Substrate Using DLTS and Room Temperature PL with Electron Beam Irradiation Pretreatment.
Keywords:Silicon Substrate, Low Carbon Concentration, DLTS
Presentation information
Oral presentation
15 Crystal Engineering » 15.7 Crystal evaluation, impurities and crystal defects
[14p-F201-1~14] 15.7 Crystal evaluation, impurities and crystal defects
Tue. Mar 14, 2017 1:45 PM - 5:30 PM F201 (F201)
Koji Sueoka(Okayama Pref. Univ.), Satoshi Nakano(Kyushu Univ.)