[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-22] XPS Analysis of Nanocrystalline Diamond Film Irradiated with Microwave Excited Hydrogen Plasma

〇Yoshiki Nakano¹, Takatoshi Watanabe¹, Naoya Morioka², Yuji Kimura², Akihisa Ogino¹ (1.Shizuoka Univ., 2.DENSO CORP.)

Keywords:Microwave plasma, Diamond film, X-ray photoelectron spectroscopy