Capacitive Coupling Simulation in Inductively-Coupled Plasma

Presentation information

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster）

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P1 (BP)

1:30 PM - 3:30 PM

〇(M1)Makato Moriyama¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)

Keywords:Capacitively coupled plasma, Inductively coupled plasma, COMSOL