[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-7] Diagnostics of Hydrocarbon Plasmas for Diamond-like Carbon Films using Mass Spectrometry and Langmuir Probe

〇SHUN FUKAI¹, Yuya Ohno¹, Akinori Oda¹ (1.Chiba Inst. Technol.)

Keywords:DLC, Hydrocarbon Gas, Quadrupole Mass Spectrometry

The DLC films have been widely used for various applications, such as automotive, semiconductors, medical devices, since the films have excellent material properties in higher hardness and higher wear resistance. In this work, radio-frequency hydrocarbon (Ar-diluted CH₄ gas mixture) plasmas have been diagnozed using a quadrupole mass spectrometer and langmuir plobe.