[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-9] Analysis of Network Structures for Chemical Reactions in Silane Plasmas

〇Yasutaka Mizui¹, Kyosuke Nobuto¹, Shigeyuki Miyagi¹, Osamu Sakai¹ (1.Univ of Shiga Pref)

Keywords:network analysis, plasma