16:00 〜 18:00
▲ [14p-P10-22] Local structure analysis of MnGa and MnGe thin films by HAADF-STEM observation
キーワード：HAADF-STEM, magnetic metal, thin film
High-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) is valuable for observation technology of crystal and interface structures with atomic resolution, and it can be applied for detailed local analysis in conjunction with microscopy-related analytical techniques. These physical analyses were applied for ordered ferromagnetic alloy thin films, MnGa and MnGe, which were studied for STT-MRAM application.