The 64th JSAP Spring Meeting, 2017

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13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14p-P3-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P3 (BP)

1:30 PM - 3:30 PM

[14p-P3-1] Solid-phase crystallization of large-grained Si1−xGex thin films on glass

〇Daichi Takahara1, Kaoru Toko1, Ryota Yoshimine1, Takashi Suemasu1 (1.Univ. of Tsukuba)

Keywords:Solid-phase crystallization, SiGe