1:30 PM - 3:30 PM
[14p-P4-2] Low temperature growth of SWCNTs from Ru catalyst by alcohol gas source method in high vacuum
Keywords:carbon nanotube, CVD, catalyst
Since single-walled carbon nanotubes (SWCNTs) have excellent properties, they are expected to be applied to electronics materials.We have succeeded in low temperature growth of SWCNT using platinum group element Pt and Rh catalyst.However, these metals are expensive, so we focused on the same platinum group element Ru.In past reports we have reported SWCNT growth at 500 ° C growth temperature with Ru catalyst.In this study, Raman spectroscopy was performed with multiple excitation wavelengths to calculate the diameter distribution, and the relation with the particle diameter of the catalyst was investigated.