[14p-P6-1~14] 3.5 Laser system and materials

△ [14p-P6-6] Generation of 14W DUV laser

〇Hiroaki Nakao¹, Masayuki Morita¹, Yushi Kaneda^1,2, Akio Miyamoto¹, Tsuyoshi Tago¹, Toshiaki Sasa¹, Masahiro Sasaura¹, Yasunori Furukawa¹ (1.OXIDE Corp., 2.University of Arizona, College of Optical Sciences)

Keywords:DUV laesr, Frequency conversion

The continuous-wave deep ultra-violet (DUV) laser with a maximum available power of 14W is demonstrated via the 4th harmonic generation using a Brewster-cut in-house grown BaB₂O₄ (BBO) together with a newly designed enhancement cavity. Due to the reflection loss for the DUV wavelength caused by the Brewster-angle, a net DUV power generated inside the BBO crystal is 18W with a net conversion efficiency of 70%. Currently, long-term operation with the DUV power of 5W has been successfully demonstrated 500 hours.