[14p-P6-1~14] 3.5 Laser system and materials

[14p-P6-7] High Power UV/DUV frequency conversion

〇Naoya Oka¹, Kengo Ito¹, Takeshi Kaneko¹, Yoshio Kuroda¹, Yasuo Tanabe¹, Masami Mizumoto¹, Michio Oka¹, Taketoshi Soda¹, Takashi Tago¹, Toshiaki Sasa¹, Masahiro Sasaura¹, Yasunori Furukawa¹ (1.Oxide Corp.)

Keywords:DUV, BBO, LBO

We report high power UV/DUV frequency conversion using direct melt grown BBO and LBO. The maximum output powers were 40 W at 355 nm and 15 W at 266 nm from high rep. rate nano second and pico second pulsed 1064 nm Yb doped fiber laser with maximum 100 W average power.