[15a-315-1~10] 13.8 Compound and power electron devices and process technology

[15a-315-8] Fabrication and Characterization of AlGaN/GaN Field Effect Diode for Wireless Power Transmission

〇naoki kato¹, Yamato Osada², Ryuichiro Kamimura², Kenji Itoh³, Akio Wakejima¹, Takashi Egawa¹ (1.Nagoya Inst. of Tech, 2.ULVAC, 3.Kanazawa Inst. of Tech)

Keywords:GaN, diode