[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-11] High resolution digital X-ray flat-panel-detector based on TV fabrication technology

〇Takeshi Fujiwara¹, Takahiro Tanino², Kazuki Shigeta², Masaki Okamura², Hiroaki Miyoshi³, Wataru Nakamura³, Hidenori Kawanishi³ (1.AIST, 2.TORAY, 3.SHARP)

Keywords:X-ray detector, radiography, FPD

A novel high resolution X-ray flat panel detector (FPD) is developed with leading TV fabrication technologies. Pixellated grid-structre scintillator is developed by applying plasma-disiplay-panel (PDP) fabrication technology. For the photo-sensor panel, low leak TFT panel is developed with applying LCD fabrication technology. The FPD is finely pixellated with 200 um pixels, and 100 * 100 mm effective area. The novel design of the detecotr is presented and high resolution x-ray imaging would be demonstrated in the presentation.