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[15a-318-6] Development of Cr/Sc/Mo multilayer condenser mirror for soft X-rays around a wavelength of 4 nm
Keywords:multilayer, water window soft X-ray, reflectometry
We developed a grazing incidence multilayer condenser mirror for soft X-ray microscopic use with laser produced plasma sources around a wavelength of 4 nm. In our previous study, 20 period Cr/Sc multilayers suffered damage when they were deposited on toroidal substrates. This time, 10 period Cr/Sc/Mo multilayers were successfully deposited on toroidal substrates. Their reflectance was measured and reflectance higher than 10% was confirmed over a wavelength range of 3.9 – 4.0 nm.