[15a-419-1~10] 6.3 酸化物エレクトロニクス

▲ [15a-419-2] Synthesis and Characterization of ZnO and Al Doped ZnO Nanostructures by Using Advanced Spray Pyrolysis Deposition Technique

Attanayake Sameera¹、Bandara Ajith¹、奥谷 昌之²、〇村上 健司² (1.静岡大創造院、2.静岡大総合院)

キーワード：transparent conductive oxide, spray pyrolysis deposition, nanostructure

We have synthesized ZnO seed layers and Al-doped ZnO nanostructures continuously by using the Advanced Spray Pyrolysis Deposition technique. In this report the structures and the properties of synthesized layers are discussed.